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Title: Design and optimization of microbolometer multilayer optical cavity

Microbolometers are the most widely used detectors in long-wave infrared uncooled thermal imagers. An optical cavity is required within a microbolometer structure to increase its optical absorption. In this work we present a detailed study on the design and optimization of a microbolometer optical cavity using Essential-Macleod package. In the simulations, the cavity is considered as thin film multi-layers that form cascaded Fabry-Perot optical cavities. In the design phase, the layers structures are selected including materials and initial thickness. The absorbing layers are chosen to be vanadium-pentoxide (V{sub 2}O{sub 5}) and titanium (Ti). In the optimization phase, the designed layer thicknesses are varied to maximize optical absorption within the absorbing layers. The simulations show that Ti layer absorption dominates over V{sub 2}O{sub 5} layer. Also, the optimization proves that the air-gap cavity thickness is not simply quarter-wavelength because of the complex cascaded Fabry-Perot structure. The optimized air-gap thickness here is ≈3.5 µm at 10.6µm wavelength.
Authors:
; ;  [1] ;  [2] ;  [3] ;  [4]
  1. Electrical Engineering Department, College of Engineering, King Saud University, Riyadh 11421 (Saudi Arabia)
  2. Prince Sultan Advanced Technologies Research Institute (PSATRI), College of Engineering, King Saud University, Riyadh 11421 (Saudi Arabia)
  3. Physics and Astronomy Department, College of Science, King Saud University, Riyadh 11451 (Saudi Arabia)
  4. (Saudi Arabia)
Publication Date:
OSTI Identifier:
22391292
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1653; Journal Issue: 1; Conference: APMAS 2014: 4. International Congress in Advances in Applied Physics and Materials Science, Fethiye (Turkey), 24-27 Apr 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ABSORPTION; BOLOMETERS; COMPUTERIZED SIMULATION; INFRARED RADIATION; LAYERS; OPTIMIZATION; THICKNESS; THIN FILMS; TITANIUM; VANADIUM OXIDES; WAVELENGTHS