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Title: Influence of growth time on crystalline structure, morphologic and optical properties of In{sub 2}O{sub 3} thin films

Indium oxide (In{sub 2}O{sub 3}) thin films are successfully deposited on glass substrate at different deposition timings by ultrasonic spray technique using Indium chloride (InCl{sub 3}) material source witch is prepared with dissolvent Ethanol (C{sub 2}H{sub 5}-OH), the physical properties of these films are characterized by XRD, MEB,UV-visible. XRD analysis revealed that the films are polycrystalline in nature having centered cubic crystal structure and symmetry space group I2{sub 1}3 with a preferred grain orientation along to (222) plane when the deposition time changes from 4 to 10 min but after t = 10 min, especially when t = 13 min we found that the majority of grains preferred the plane (400). The maximum value of grain size D = 61,51 nm is attained for In{sub 2}O{sub 3} films grown at t =10 min. the average transmittance is about 72%, The optical gap energy is found to decrease from 3.8 to 3.66 eV with growth time Increased from 4 to 10 min but after t = 10 min the value of E{sub g} will increase to 3.72 eV. A systematic study on the influence of growth time on the properties of In{sub 2}O{sub 3} thin films deposited by ultrasonic spray at 400 °C has been reported.
Authors:
; ; ; ; ; ;  [1]
  1. Physics of thin films and applications laboratory, University of biskra, BP 145 RP, 07000 Biskra (Algeria)
Publication Date:
OSTI Identifier:
22391291
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1653; Journal Issue: 1; Conference: APMAS 2014: 4. International Congress in Advances in Applied Physics and Materials Science, Fethiye (Turkey), 24-27 Apr 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CRYSTAL GROWTH; CUBIC LATTICES; ETHANOL; EV RANGE; GRAIN ORIENTATION; GRAIN SIZE; INDIUM CHLORIDES; INDIUM OXIDES; OPTICAL PROPERTIES; POLYCRYSTALS; SUBSTRATES; THIN FILMS; X-RAY DIFFRACTION