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Title: Microstructural evaluation of NiTi-based films deposited by magnetron sputtering

Shape memory alloy films belonging to the NiTi-based systems were deposited on heated and unheated substrates, by magnetron sputtering in a custom made system, and their structure and composition was analyzed using electron microscopy. Several substrates were used for the depositions: glass, Cu-Zn-Al, Cu-Al-Ni and Ti-NiCu shape memory alloy ribbons and kapton. The composition of the Ti-Ni-Cu films showed limited differences, compared to the one of the target and the microstructure for the DC magnetron sputtering revealed crystallized structure with features determined on peel off samples from a Si wafer. Both inter and transcrystalline fractures were observed and related to the interfacial stress developed on cooling from deposition temperature.
Authors:
; ;  [1] ;  [2]
  1. Department of Materials and Manufacturing Engineering, Politehnica University of Timisoara (Romania)
  2. Department of Materials and Manufacturing Engineering, Politehnica University of Timisoara and Department of Physics, West University Timisoara (Romania)
Publication Date:
OSTI Identifier:
22390744
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1634; Journal Issue: 1; Conference: TIM-13 Physics Conference, Timisoara (Romania), 21-24 Nov 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM ALLOYS; COMPARATIVE EVALUATIONS; COPPER ALLOYS; CRYSTAL STRUCTURE; DEPOSITION; ELECTRON MICROSCOPY; FILMS; FRACTURES; METALLIC GLASSES; MICROSTRUCTURE; NICKEL ALLOYS; SHAPE MEMORY EFFECT; SILICON; SPUTTERING; STRESSES; SUBSTRATES; ZINC ALLOYS