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Title: The influence of vacancy generation at the initial stage of ion implantation

The paper presents a coupled isothermal model at the initial stage of a solid surface treatment with particle beams. Mechanical stresses arising due to the interaction of particles with the surface affect the redistribution of the implanted impurity. Vacancies in the metal surface and their generation under stress are also taken into account. The kinetic law is formulated on the basis of thermodynamics of irreversible processes. The authors used numerical investigation methods. As a result, they have obtained the distributions of impurity concentration and deformations for various time moments. The authors also compare the concentration and deformation profiles with and without vacancies and study the influences of some model parameters. The effect of vacancy generation on the diffusion has been established to lead to an increase in the depth of penetration, as well as in the concentration of impurities.
Authors:
 [1] ;  [2]
  1. Institute of High Technology Physics, National Research Tomsk Polytechnic University, Tomsk, 634050 (Russian Federation)
  2. Institute of High Technology Physics, National Research Tomsk Polytechnic University, Tomsk, 634050, Russia and Institute of Strength Physics and Materials Science SB RAS, Tomsk, 634055 (Russian Federation)
Publication Date:
OSTI Identifier:
22390437
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1623; Journal Issue: 1; Conference: International Conference on Physical Mesomechanics of Multilevel Systems 2014, Tomsk (Russian Federation), 3-5 Sep 2014; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; COMPARATIVE EVALUATIONS; CONCENTRATION RATIO; DEFORMATION; DIFFUSION; ION BEAMS; ION IMPLANTATION; IRRADIATION; PENETRATION DEPTH; RADIATION EFFECTS; SOLIDS; STRESSES; SURFACE TREATMENTS; SURFACES; THERMODYNAMICS; VACANCIES