skip to main content

Title: Design and characterization of ultra-stretchable monolithic silicon fabric

Stretchable electronic systems can play instrumental role for reconfigurable macro-electronics such as distributed sensor networks for wearable and bio-integrated electronics. Typically, polymer composite based materials and its deterministic design as interconnects are used to achieve such systems. Nonetheless, non-polymeric inorganic silicon is the predominant material for 90% of electronics. Therefore, we report the design and fabrication of an all silicon based network of hexagonal islands connected through spiral springs to form an ultra-stretchable arrangement for complete compliance to highly asymmetric shapes. Several design parameters are considered and their validation is carried out through finite element analysis. The fabrication process is based on conventional microfabrication techniques and the measured stretchability is more than 1000% for single spirals and area expansions as high as 30 folds in arrays. The reported method can provide ultra-stretchable and adaptable electronic systems for distributed network of high-performance macro-electronics especially useful for wearable electronics and bio-integrated devices.
Authors:
;  [1] ;  [2] ;  [3] ;  [2] ;  [4] ;  [5]
  1. Integrated Nanotechnology Lab, King Abdullah University of Science and Technology, 23955 Thuwal (Saudi Arabia)
  2. (Saudi Arabia)
  3. Computer, Electrical and Mathematical Sciences and Engineering Division, King Abdullah University of Science and Technology, 23955 Thuwal (Saudi Arabia)
  4. Electromechanical Microsystems and Polymer Integration Research Lab, King Abdullah University of Science and Technology, 23955 Thuwal (Saudi Arabia)
  5. (Canada)
Publication Date:
OSTI Identifier:
22350931
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 15; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 36 MATERIALS SCIENCE; ASYMMETRY; EXPANSION; FINITE ELEMENT METHOD; POLYMERS; SENSORS; SILICON