Double-sided reel-to-reel metal-organic chemical vapor deposition system of YBa{sub 2}Cu{sub 3}O{sub 7-δ} thin films
- State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054 (China)
Two-micrometer thick YBa{sub 2}Cu{sub 3}O{sub 7-δ} (YBCO) films have been successfully deposited on both sides of LaAlO{sub 3} single crystalline substrates by using a home-made reel-to-reel metal-organic chemical vapor deposition (MOCVD) system, which has two opposite symmetrical shower heads and a special-designed heater. This technique can simultaneously fabricate double-sided films with high deposition rate up to 500 nm/min, and lead to doubling current carrying capability of YBCO, especially for coated conductors (CCs). X-ray diffraction analysis showed that YBCO films were well crystallized and highly epitaxial with the full width at half maximum values of 0.2° ∼ 0.3° for the rocking curves of (005) YBCO and 1.0° for Φ-scans of (103) YBCO. Scanning electron microscope revealed dense, crack-free, slightly rough surface with Ba-Cu-O precipitates. The films showed critical current density (J{sub c}, 77 K, 0 T) of about 1 MA/cm{sup 2}, and overall critical current of 400 A/cm, ascribed to the double-sided structure. Our results also demonstrated that the temperature and composition in the deposition zone were uniform, which made MOCVD preparation of low cost and high performance double-sided YBCO CCs more promising for industrialization.
- OSTI ID:
- 22318052
- Journal Information:
- Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 32, Issue 4; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
- Country of Publication:
- United States
- Language:
- English
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