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Title: Modulated IR radiometry for determining thermal properties and basic characteristics of titanium thin films

Titanium thin films of different thicknesses were prepared by direct current magnetron sputtering to study modulated infrared (IR) radiometry as a tool for analyzing film thickness. Thickness was varied by regularly increasing the deposition time, keeping all the other deposition parameters constant. The influence of film thickness on morphological, structural, and electrical properties of the titanium coatings also was investigated. The experimental results revealed a systematic grain growth with increasing film thickness, along with enhanced film crystallinity, which led to increased electrical conductivity. Using the results obtained by modulated IR radiometry, the thickness of each thin film was calculated. These thickness values were then compared with the coating thickness measurements obtained by scanning electron microscopy. The values confirmed the reliability of modulated IR radiometry as an analysis tool for thin films and coatings, and for determining thicknesses in the micrometer range, in particular.
Authors:
 [1] ; ; ;  [2] ;  [3]
  1. Centro de Física, Universidade do Minho, 4710-057 Braga, Portugal and MATEIS Laboratory-INSA de Lyon, Bât. B. Pascal, 7 Avenue Jean Capelle, 69621 Villeurbanne Cedex (France)
  2. Centro de Física, Universidade do Minho, 4710-057 Braga (Portugal)
  3. Centro de Física, Universidade do Minho, 4710-057 Braga, Portugal and SEG-CEMUC Mechanical Engineering Department, University of Coimbra, 3030-788 Coimbra (Portugal)
Publication Date:
OSTI Identifier:
22318051
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 32; Journal Issue: 4; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; DIRECT CURRENT; ELECTRIC CONDUCTIVITY; INFRARED RADIATION; MAGNETRONS; SCANNING ELECTRON MICROSCOPY; THERMODYNAMIC PROPERTIES; THICKNESS; THIN FILMS; TITANIUM