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Title: ZnO/porous-Si and TiO{sub 2}/porous-Si nanocomposite nanopillars

Porous Si nanopillar arrays are used as templates for atomic layer deposition of ZnO and TiO{sub 2}, and thus, ZnO/porous-Si and TiO{sub 2}/porous-Si nanocomposite nanopillars are fabricated. The diffusion of the precursor molecules into the inside of the porous structure occurs via Knudsen diffusion and is strongly limited by the small pore size. The luminescence of the ZnO/porous-Si nanocomposite nanopillars is also investigated, and the optical emission can be changed and even quenched after a strong plasma treatment. Such nanocomposite nanopillars are interesting for photocatalysis and sensors.
Authors:
; ;  [1] ;  [2] ; ;  [3] ;  [4]
  1. Chair Materials for Electronics, Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano, TU Ilmenau, Gustav-Kirchhoff-Str. 5, 98693 Ilmenau (Germany)
  2. Oxford Instruments Plasma Technology Ltd., Yatton, Bristol BS49 4AP (United Kingdom)
  3. Institute for Solid State Physics, Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743 Jena (Germany)
  4. SUSS MicroTec Lithography GmbH, Schleissheimer Str. 90, 85748 Garching (Germany)
Publication Date:
OSTI Identifier:
22318045
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 33; Journal Issue: 1; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; DIFFUSION; LUMINESCENCE; NANOSTRUCTURES; PHOTOCATALYSIS; PLASMA; POROUS MATERIALS; PRECURSOR; SENSORS; TITANIUM OXIDES; ZINC OXIDES