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Title: ZnO nanorod growth by plasma-enhanced vapor phase transport with different growth durations

In this study, the structural properties of ZnO nanostructures grown by plasma-enhanced vapor phase transport (PEVPT) were investigated. Plasma-treated oxygen gas was used as the oxygen source for the ZnO growth. The structural properties of ZnO nanostructures grown for different durations were measured by scanning electron microscopy, x-ray diffraction, and transmission electron microscopy. The authors comprehensively analyzed the growth of the ZnO nanostructures with different growth durations both with and without the use of plasma-treated oxygen gas. It was found that PEVPT has a significant influence on the growth of the ZnO nanorods. PEVPT with plasma-treated oxygen gas facilitated the generation of nucleation sites, and the resulting ZnO nanorod structures were more vertical than those prepared by conventional VPT without plasma-treated oxygen gas. As a result, the ZnO nanostructures grown using PEVPT showed improved structural properties compared to those prepared by the conventional VPT method.
Authors:
;  [1] ;  [2] ;  [3] ;  [4]
  1. Department of Nano Science and Engineering, Inje University, Obang-dong, Gimhae, Gyeongnam 621-749 (Korea, Republic of)
  2. Department of Nano Science and Engineering, Center for Nano Manufacturing, Inje University, Obang-dong, Gimhae, Gyeongnam 621-749 (Korea, Republic of)
  3. Department of Nano Science and Engineering, Kyungnam University, Changwon, Gyeongnam 631-701 (Korea, Republic of)
  4. Department of Materials and Components Engineering, Dong-Eui University, 995 Eomgwangno, Busanjin-gu, Busan 614-714 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22318037
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 32; Journal Issue: 5; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; NANOSTRUCTURES; OXYGEN; PLASMA; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; VAPORS; X-RAY DIFFRACTION; ZINC OXIDES