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Title: Surface temperature: A key parameter to control the propanethiol plasma polymer chemistry

In this work, the influence of the substrate temperature (T{sub s}) on the chemical composition of propanethiol plasma polymers was investigated for a given set of plasma conditions. In a first study, a decrease in the atomic sulfur content (at. %S) with the deposition time (t{sub d}) was observed. This behavior is explained by the heating of the growing film during deposition process, limiting the incorporation of stable sulfur-based molecules produced in the plasma. Experiments carried out by controlling the substrate temperature support this hypothesis. On the other hand, an empirical law relating the T{sub s} and the at. %S was established. This allows for the formation of gradient layer presenting a heterogeneous chemical composition along the thickness, as determined by depth profile analysis combining X-ray photoelectron spectroscopy and C{sub 60} ion gun sputtering. The experimental data fit with the one predicted from our empiric description. The whole set of our results provide new insights in the relationship between the substrate temperature and the sulfur content in sulfur-based plasma polymers, essential for future developments.
Authors:
;  [1] ; ;  [2] ;  [3]
  1. Chimie des Interactions Plasma Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons (Belgium)
  2. Research Group Electrochemical and Surface Engineering (SURF), Department of Materials and Chemistry (MACH), Pleinlaan 2, 1050 Brussel (Belgium)
  3. Chimie des Interactions Plasma Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons, Belgium and Materia Nova Research Center, Parc Initialis, B-7000 Mons (Belgium)
Publication Date:
OSTI Identifier:
22318032
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films; Journal Volume: 32; Journal Issue: 5; Other Information: (c) 2014 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; FULLERENES; PLASMA; POLYMERS; SPUTTERING; SULFUR; SULFUR CONTENT; SURFACES; X-RAY PHOTOELECTRON SPECTROSCOPY