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Title: A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al{sub 2}O{sub 3} films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications.
Authors:
 [1] ;  [2] ; ;  [1] ;  [3]
  1. General Motors Global Research and Development Center, Warren, Michigan 48090 (United States)
  2. (United States)
  3. Department of Chemical and Materials Engineering, University of Kentucky, Lexington, Kentucky 40506-0046 (United States)
Publication Date:
OSTI Identifier:
22317989
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 6; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ALUMINIUM OXIDES; ELASTICITY; LASERS; SOUND WAVES; SUBSTRATES; THIN FILMS