A non-destructive method for measuring the mechanical properties of ultrathin films prepared by atomic layer deposition

Journal Article · Mon Aug 11 00:00:00 EDT 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4892539· OSTI ID:22317989

Zhang, Qinglin ^[1]; Xiao, Xingcheng; Verbrugge, Mark W. ^[1]; Cheng, Yang-Tse ^[2]

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1. General Motors Global Research and Development Center, Warren, Michigan 48090 (United States)
2. Department of Chemical and Materials Engineering, University of Kentucky, Lexington, Kentucky 40506-0046 (United States)

The mechanical properties of ultrathin films synthesized by atomic layer deposition (ALD) are critical for the liability of their coated devices. However, it has been a challenge to reliably measure critical properties of ALD films due to the influence from the substrate. In this work, we use the laser acoustic wave (LAW) technique, a non-destructive method, to measure the elastic properties of ultrathin Al{sub 2}O{sub 3} films by ALD. The measured properties are consistent with previous work using other approaches. The LAW method can be easily applied to measure the mechanical properties of various ALD thin films for multiple applications.

• OSTI ID: 22317989
• Journal Information: Applied Physics Letters, Vol. 105, Issue 6; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM OXIDES
ELASTICITY
LASERS
SOUND WAVES
SUBSTRATES
THIN FILMS