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Title: Structural evolution of platinum thin films grown by atomic layer deposition

The structural properties of Pt films grown by atomic layer deposition (ALD) are investigated with synchrotron based x-ray scattering and x-ray diffraction techniques. Using grazing incidence small angle scattering, we measure the lateral growth rate of the Pt islands to be 1.0 Å/cycle. High resolution x-ray diffraction reveals that the in-plane strain of the Pt lattice undergoes a transition from compressive strain to tensile strain when the individual islands coalescence into a continuous film. This transition to tensile strain is attributed to the lateral expansion that occurs when neighboring islands merge to reduce their surface energy. Using 2D grazing incidence x-ray diffraction, we show that the lattice orientation becomes more (111) oriented during deposition, with a sharp transition occurring during coalescence. Pt ALD performed at a lower deposition temperature (250 °C) is shown to result in significantly more randomly oriented grains.
Authors:
; ;  [1] ; ;  [2] ;  [3] ;  [4] ;  [3]
  1. Department of Chemical Engineering, Stanford University, Stanford, California 94305 (United States)
  2. Department of Materials Science and Engineering, Stanford University, Stanford, California 94305 (United States)
  3. SLAC National Accelerator Laboratory, Stanford Synchrotron Radiation Lightsource, Menlo Park, California 94025 (United States)
  4. (United States)
Publication Date:
OSTI Identifier:
22314632
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 6; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; COALESCENCE; DEPOSITION; PLATINUM; RESOLUTION; SMALL ANGLE SCATTERING; STRAINS; SURFACE ENERGY; THIN FILMS; X-RAY DIFFRACTION