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Title: Fast electromigration crack in nanoscale aluminum film

The current-induced breakage of 20 nm thin aluminum layers deposited onto capacitor grade polypropylene (PP) films is experimentally studied. Biexponential current pulses of different amplitude (10–15 A) and duration (0.1–1 μs) were applied to the samples. Breakage occurred after fast development of electromigrating ∼200 nm-wide cracks with initial propagation velocity of ∼1 m/s under a high current density of ∼10{sup 12 }A/m{sup 2}. The cracks stopped when their lengths reached 250–450 μm. This behavior is explained by the balance of electromigration and stress-induced atomic fluxes.
Authors:
;  [1]
  1. St. Petersburg State Polytechnical University, Saint-Petersburg (Russian Federation)
Publication Date:
OSTI Identifier:
22314620
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 6; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ALUMINIUM; AMPLITUDES; CRACKS; CURRENT DENSITY; CURRENTS; DEPOSITS; ELECTROPHORESIS; FILMS; LAYERS; LENGTH; NANOSTRUCTURES; POLYPROPYLENE; PULSES; STRESSES; VELOCITY