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Title: Impact of thermal stress on the piezoelectric and dielectric properties of PbTiO{sub 3} thick films on various substrates

The impact of thermal stress on the polarization, as well as dielectric and piezoelectric properties of (001) oriented PbTiO{sub 3} (PTO) thick films deposited on various substrates was investigated based on Landau-Devonshire thermodynamic model. The results showed that dielectric and piezoelectric properties of PTO films depend strongly on the thermal stress in PTO films decided by the deposition temperature T{sub G} and the thermal expansion coefficients' difference between PTO films and substrates. For IC-compatible substrates such as Si, c-sapphire, and a-sapphire that induce tensile in-plane thermal stresses, the dielectric and piezoelectric responses and tunabilities of PTO films were enhanced. Whereas for PTO films on MgO, compressive thermal in-plane stresses can degraded the dielectric and piezoelectric responses and tunabilities of the films.
Authors:
 [1] ;  [2] ;  [3] ;  [4] ;  [1]
  1. College of Electronic Science and Engineering and Microelectronic Information Functional Materials and Devices Research Center, Nanjing University of Posts and Telecommunications, Nanjing 210046 (China)
  2. (China)
  3. Department of Materials Science and Engineering and National Laboratory of Solid State Microstructures, Nanjing University, Nanjing 210093 (China)
  4. College of Electronic and information Engineering, Hebei University, Baoding 071002 (China)
Publication Date:
OSTI Identifier:
22314560
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; DEPOSITION; DEPOSITS; DIELECTRIC MATERIALS; DIELECTRIC PROPERTIES; FILMS; LEAD COMPOUNDS; MAGNESIUM OXIDES; PIEZOELECTRICITY; POLARIZATION; SAPPHIRE; SUBSTRATES; THERMAL EXPANSION; THERMAL STRESSES; THERMODYNAMIC MODEL; TITANATES