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Title: Open and closed loop manipulation of charged microchiplets in an electric field

We demonstrate the ability to orient, position, and transport microchips (“chiplets”) with electric fields. In an open-loop approach, modified four phase traveling wave potential patterns manipulate chiplets in a dielectric solution using dynamic template agitation techniques. Repeatable parallel assembly of chiplets is demonstrated to a positional accuracy of 6.5 μm using electrodes of 200 μm pitch. Chiplets with dipole surface charge patterns are used to show that orientation can be controlled by adding unique charge patterns on the chiplets. Chip path routing is also demonstrated. With a closed-loop control system approach using video feedback, dielectric, and electrophoretic forces are used to achieve positioning accuracy of better than 1 μm with 1 mm pitch driving electrodes. These chip assembly techniques have the potential to enable future printer systems where inputs are electronic chiplets and the output is a functional electronic system.
Authors:
; ; ; ; ; ; ; ; ;  [1]
  1. Palo Alto Research Center, Inc., 3333 Coyote Hill Rd., Palo Alto, California 94304 (United States)
Publication Date:
OSTI Identifier:
22314528
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CLOSED-LOOP CONTROL; DIELECTRIC MATERIALS; ELECTRIC FIELDS; ELECTRODES; ELECTROPHORESIS; MICROSTRUCTURE; PITCHES; TRAVELLING WAVES