Advances in quantitative nanoscale subsurface imaging by mode-synthesizing atomic force microscopy

Journal Article · Mon Aug 04 00:00:00 EDT 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4892467· OSTI ID:22314509

Vitry, P.; Bourillot, E.; Plassard, C.; Lacroute, Y.; Lesniewska, E. ^[1]; Tetard, L. ^[2]

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1. ICB, UMR CNRS 6303 CNRS-University of Bourgogne, Dijon F-21078 (France)
2. Nanoscience Technology Center, University of Central Florida, Orlando, Florida 32826 (United States)

This paper reports on advances toward quantitative non-destructive nanoscale subsurface investigation of a nanofabricated sample based on mode synthesizing atomic force microscopy with heterodyne detection, addressing the need to correlate the role of actuation frequencies of the probe f{sub p} and the sample f{sub s} with depth resolution for 3D tomography reconstruction. Here, by developing a simple model and validating the approach experimentally through the study of the nanofabricated calibration depth samples consisting of buried metallic patterns, we demonstrate avenues for quantitative nanoscale subsurface imaging. Our findings enable the reconstruction of the sample depth profile and allow high fidelity resolution of the buried nanostructures. Non-destructive quantitative nanoscale subsurface imaging offers great promise in the study of the structures and properties of complex systems at the nanoscale.

• OSTI ID: 22314509
• Journal Information: Applied Physics Letters, Vol. 105, Issue 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATOMIC FORCE MICROSCOPY
COMPUTERIZED TOMOGRAPHY
NANOSTRUCTURES
SURFACES
THREE-DIMENSIONAL CALCULATIONS