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Title: Investigation of plasma diagnostics using a dual frequency harmonic technique

Plasma diagnostic methods using harmonic currents analysis of electrostatic probes were experimentally investigated to understand the differences in their measurement of the plasma parameters. When dual frequency voltage (ω{sub 1},ω{sub 2}) was applied to a probe, various harmonic currents (ω{sub 1}, 2ω{sub 1},ω{sub 2}, 2ω{sub 2},ω{sub 2}±ω{sub 1},ω{sub 2}±2ω{sub 1}) were generated due to the non-linearity of the probe sheath. The electron temperature can be obtained from the ratio of the two harmonics of the probe currents. According to the combinations of the two harmonics, the sensitivities in the measurement of the electron temperature differed, and this results in a difference of the electron temperature. From experiments and simulation, it is shown that this difference is caused by the systematic and random noise.
Authors:
 [1] ; ; ; ;  [2]
  1. Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul (Korea, Republic of)
  2. Department of Electrical Engineering, Hanyang University, Seoul (Korea, Republic of)
Publication Date:
OSTI Identifier:
22314369
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 9; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CURRENTS; ELECTRIC POTENTIAL; ELECTRON TEMPERATURE; ELECTROSTATIC PROBES; HARMONICS; NOISE; PLASMA DIAGNOSTICS; RANDOMNESS; SENSITIVITY; SIMULATION