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Title: High sensitive formaldehyde graphene gas sensor modified by atomic layer deposition zinc oxide films

Zinc oxide (ZnO) thin films with various thicknesses were fabricated by Atomic Layer Deposition on Chemical Vapor Deposition grown graphene films and their response to formaldehyde has been investigated. It was found that 0.5 nm ZnO films modified graphene sensors showed high response to formaldehyde with the resistance change up to 52% at the concentration of 9 parts-per-million (ppm) at room temperature. Meanwhile, the detection limit could reach 180 parts-per-billion (ppb) and fast response of 36 s was also obtained. The high sensitivity could be attributed to the combining effect from the highly reactive, top mounted ZnO thin films, and high conductive graphene base network. The dependence of ZnO films surface morphology and its sensitivity on the ZnO films thickness was also investigated.
Authors:
; ; ;  [1] ; ;  [2]
  1. Department of Physics, School of Science, East China University of Science and Technology, 130 Meilong Road, Shanghai 200237 (China)
  2. Department of Physics, Shanghai Normal University, 100 Guilin Road, Shanghai 200234 (China)
Publication Date:
OSTI Identifier:
22311157
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 3; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CHEMICAL VAPOR DEPOSITION; FORMALDEHYDE; GRAPHENE; SENSITIVITY; SENSORS; SURFACES; TEMPERATURE RANGE 0273-0400 K; THICKNESS; THIN FILMS; ZINC OXIDES