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Title: Phase lag deduced information in photo-thermal actuation for nano-mechanical systems characterization

In photo-thermal actuation, heat is added locally to a micro-cantilever by means of a laser. A fraction of the irradiation is absorbed, yielding thermal stresses and deformations in the structure. Harmonic modulation of the laser power causes the cantilever to oscillate. Moreover, a phase lag is introduced which is very sensitive to the spot location and the cantilever properties. This phase lag is theoretically predicted and experimentally verified. Combined with thermo-mechanical properties of the cantilever and its geometry, the location of the laser spot, the thermal diffusivity, and the layer thicknesses of the cantilever can be extracted.
Authors:
;  [1] ;  [1] ;  [2]
  1. Department of Optomechatronics, TNO, Stieltjesweg 1, 2628 CK Delft (Netherlands)
  2. (Netherlands)
Publication Date:
OSTI Identifier:
22310908
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 7; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; DEFORMATION; HEAT; IRRADIATION; LASER RADIATION; MECHANICAL PROPERTIES; MODULATION; THERMAL DIFFUSIVITY; THERMAL STRESSES; THICKNESS