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Title: Effects of polycrystallinity in nano patterning by ion-beam sputtering

Employing graphites with distinctly different mean grain sizes, we study the effects of polycrystallinity on the pattern formation by ion-beam sputtering. The grains influence the growth of the ripples in a highly anisotropic fashion; both the mean uninterrupted ripple length along the ridges and the surface width depend on the mean size of the grains, which is attributed to the large sputter yield at the grain boundary compared with that on the terrace. In contrast, the ripple wavelength does not depend on the mean size of the grains, indicating that the mass transport across the grain boundaries should efficiently proceed by both thermal diffusion and ion-induced processes.
Authors:
;  [1] ; ;  [2] ; ;  [3]
  1. Department of Physics, Sook-Myung Women's University, Seoul 140-742 (Korea, Republic of)
  2. Department of Physics, Sogang University, Seoul 121-742 (Korea, Republic of)
  3. Beamline Research Division, Pohang Accelerator Laboratory (PAL), Pohang 790-784 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22308979
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 2; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANISOTROPY; BEAMS; CRYSTAL GROWTH; GRAIN BOUNDARIES; GRAIN SIZE; GRAPHITE; MASS; SPUTTERING; SURFACES; THERMAL DIFFUSION; WAVELENGTHS