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Title: Fs-laser processing of polydimethylsiloxane

We present an experimental analysis on surface structuring of polydimethylsiloxane films with UV (263 nm) femtosecond laser pulses, in air. Laser processed areas are analyzed by optical microscopy, SEM, and μ-Raman spectroscopy. The laser-treated sample shows the formation of a randomly nanostructured surface morphology. μ-Raman spectra, carried out at both 514 and 785 nm excitation wavelengths, prior and after laser treatment allow evidencing the changes in the sample structure. The influence of the laser fluence on the surface morphology is studied. Finally, successful electro-less metallization of the laser-processed sample is achieved, even after several months from the laser-treatment contrary to previous observation with nanosecond pulses. Our findings address the effectiveness of fs-laser treatment and chemical metallization of polydimethylsiloxane films with perspective technological interest in micro-fabrication devices for MEMS and nano-electromechanical systems.
Authors:
;  [1] ; ; ; ;  [2] ; ; ;  [3] ; ;  [4]
  1. Institute of Electronics, Bulgarian Academy of Sciences, 72 Tsarigradsko Shose, Sofia 1784 (Bulgaria)
  2. Rostislaw Kaischew Institute of Physical Chemistry, Bulgarian Academy of Sciences, Acad. G. Bonchev Str., Block 11, Sofia 1113 (Bulgaria)
  3. CNR-SPIN, Dipartimento di Scienze Fisiche, Universita degli Studi di Napoli Federico II, Complesso Universitario di Monte S. Angelo, Via Cintia, I-80126 Napoli (Italy)
  4. Photophysics Department, The Szewalski Institute, Polish Academy of Sciences, 14 Fiszera St, 80-231 Gdańsk (Poland)
Publication Date:
OSTI Identifier:
22308707
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 2; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; EXCITATION; FILMS; LASER RADIATION; MEMS; NANOSTRUCTURES; OPTICAL MICROSCOPY; RAMAN SPECTRA; RAMAN SPECTROSCOPY; RANDOMNESS; SCANNING ELECTRON MICROSCOPY; SURFACES; WAVELENGTHS