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Title: Characterization on RF magnetron sputtered niobium pentoxide thin films

Niobium pentoxide (Nb{sub 2}O{sub 5}) thin films with amorphous nature were deposited on microscopic glass substrates at 100°C by rf magnetron sputtering technique. The effect of rf power on the structural, morphological, optical, and vibrational properties of Nb{sub 2}O{sub 5} films have been investigated. Optical study shows the maximum average transmittance of about 87% and the optical energy band gap (indirect allowed) changes between 3.70 eV and 3.47 eV. AFM result indicates the smooth surface nature of the samples. Photoluminescence measurement showed the better optical quality of the deposited films. Raman spectra show the LO-TO splitting of Nb-O stretching of Nb{sub 2}O{sub 5} films.
Authors:
 [1] ;  [2] ;  [3]
  1. Department of Physics, Alagappa University, Karaikudi - 630 004 (India)
  2. Directorate of Distance Education, Alagappa University, Karaikudi - 630 004 (India)
  3. Department of Physics, Alagappa Chettiar College of Engineering and Technology, Karaikudi - 630 004 (India)
Publication Date:
OSTI Identifier:
22308015
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1620; Journal Issue: 1; Conference: Optics 14: International conference on optics: Light and its interactions with matter, Calicut, Kerala (India), 19-21 Mar 2014; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; AMORPHOUS STATE; ATOMIC FORCE MICROSCOPY; EMISSION SPECTRA; ENERGY GAP; EV RANGE; GLASS; NIOBIUM OXIDES; OPACITY; PHOTOLUMINESCENCE; RAMAN SPECTRA; SPUTTERING; SUBSTRATES; SURFACES; THIN FILMS