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Title: Determination of the optical properties and size dispersion of Si nanoparticles within a dielectric matrix by spectroscopic ellipsometry

We report on a comparative study between dielectric functions of Si nanoparticles (Si-NPs) obtained from Bruggeman effective medium approximation (BEMA), Maxwell-Garnett (MG), and a modified Maxwell-Garnett (MMG) models. Unlike BEMA and MG, a size-distribution dependent dielectric function of Si-NPs is considered in the introduced MMG model. We show that the standard deviation σ of a size distribution can be evaluated by analyzing the imaginary part of the dielectric functions of Si-NPs extracted from BEMA and MMG. In order to demonstrate this, several samples composed of Si-NPs embedded in silicon-rich silicon nitride are investigated by spectroscopic ellipsometry over the photon energy range varying between 2 and 4 eV. Assuming a lognormal size distribution of the Si nanoparticles, it is evidenced that the parameter σ ranges between 1.15 and 1.35. The values of size dispersion deduced by this methodology are in good agreement with TEM observations.
Authors:
 [1] ;  [2] ; ;  [1] ;  [3] ;  [4] ;  [3] ;  [5] ; ;  [3]
  1. LCP-A2MC, Institut Jean Barriol, Université de Lorraine, 1 Bd Arago, 57070 Metz (France)
  2. (formerly Max Planck Institute for Metals Research), Heisenbergstraße 3, D-70569 Stuttgart (Germany)
  3. ICube, Université de Strasbourg-CNRS, 23 rue du Loess BP20, 67037 Strasbourg Cedex 2 (France)
  4. (Canada)
  5. (France)
Publication Date:
OSTI Identifier:
22305945
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 10; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; DIELECTRIC MATERIALS; DISPERSIONS; DISTRIBUTION; ELLIPSOMETRY; EV RANGE; MATRIX MATERIALS; NANOPARTICLES; OPTICAL PROPERTIES; PHOTONS; SILICON; TRANSMISSION ELECTRON MICROSCOPY