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Title: Synthesis and in vacuo deposition of iron oxide nanoparticles by microplasma-assisted decomposition of ferrocene

Microplasma-assisted gas-phase nucleation has emerged as an important new approach to produce high-purity, nanometer-sized, and narrowly dispersed particles. This study aims to integrate this technique with vacuum conditions to enable synthesis and deposition in an ultrahigh vacuum compatible environment. The ultimate goal is to combine nanoparticle synthesis with photoemission spectroscopy-based electronic structure analysis. Such measurements require in vacuo deposition to prevent surface contamination from sample transfer, which can be deleterious for nanoscale materials. A homebuilt microplasma reactor was integrated into an existing atomic layer deposition system attached to a surface science multi-chamber system equipped with photoemission spectroscopy. As proof-of-concept, we studied the decomposition of ferrocene vapor in the microplasma to synthesize iron oxide nanoparticles. The injection parameters were optimized to achieve complete precursor decomposition under vacuum conditions, and nanoparticles were successfully deposited. The stoichiometry of the deposited samples was characterized in situ using X-ray photoelectron spectroscopy indicating that iron oxide was formed. Additional transmission electron spectroscopy characterization allowed the determination of the size, shape, and crystal lattice of the particles, confirming their structural properties.
Authors:
 [1] ; ;  [2] ;  [3]
  1. Department of Physics, University of South Florida, Tampa, Florida 33620 (United States)
  2. Department of Chemical and Biomolecular Engineering, Case Western Reserve University, Ohio 44106 (United States)
  3. Department of Electrical Engineering, University of South Florida, Tampa, Florida 33620 (United States)
Publication Date:
OSTI Identifier:
22305753
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 116; Journal Issue: 13; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY; CRYSTAL LATTICES; DECOMPOSITION; DEPOSITION; ELECTRONIC STRUCTURE; FERROCENE; IMPURITIES; INJECTION; IRON OXIDES; NANOPARTICLES; NANOSTRUCTURES; PHOTOEMISSION; STOICHIOMETRY; SURFACE CLEANING; SURFACES; SYNTHESIS; TRANSMISSION; X-RAY PHOTOELECTRON SPECTROSCOPY