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Title: Time-resolved spatial distribution of plasma in the ablation of a Ba₀.₆Sr₀.₄TiO₃ target by 25 ns KrF ultraviolet laser

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.4897223· OSTI ID:22305739
; ;  [1];  [2]
  1. Groupe de Recherche en Matériaux, microélectronique, Acoustique et Nanotechnologies (GREMAN) - UMR 7347 CNRS-CEA, Université François Rabelais de Tours, Faculté des Sciences and Techniques, Parc Grandmont - bât. E – 37200 Tours (France)
  2. Laboratoire Lasers, Plasmas et Procédés Photoniques (LP3), UMR 6182 CNRS, Aix-Marseille Université, 163 Avenue de Luminy, C. 917 - 13288 Marseille (France)

We performed radially and longitudinally time-resolved plasma analysis during pulsed laser deposition of Ba₀.₆Sr₀.₄TiO₃ thin films. The plasma is shown to be optically thick and strongly non-uniform during the early expansion phase and the resonance line Ba II (455.4 nm) is strongly self-reversed during this time. Plasma temperature and electron density were obtained by comparing experimental emission spectra with the spectral radiance computed for a non-uniform plasma in local thermal equilibrium.

OSTI ID:
22305739
Journal Information:
Journal of Applied Physics, Vol. 116, Issue 13; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English