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Title: Heating mode transition in a hybrid direct current/dual-frequency capacitively coupled CF{sub 4} discharge

Computer simulations based on the particle-in-cell/Monte Carlo collision method are performed to study the plasma characteristics and especially the transition in electron heating mechanisms in a hybrid direct current (dc)/dual-frequency (DF) capacitively coupled CF{sub 4} discharge. When applying a superposed dc voltage, the plasma density first increases, then decreases, and finally increases again, which is in good agreement with experiments. This trend can be explained by the transition between the four main heating modes, i.e., DF coupling, dc and DF coupling, dc source dominant heating, and secondary electron dominant heating.
Authors:
 [1] ;  [2] ;  [1] ;  [3]
  1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024 (China)
  2. (Belgium)
  3. Department of Chemistry, University of Antwerp, Campus Drie Eiken, Universiteitsplein 1, BE-2610 Wilrijk-Antwerp (Belgium)
Publication Date:
OSTI Identifier:
22304166
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 22; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CARBON TETRAFLUORIDE; COLLISIONS; COMPUTERIZED SIMULATION; COUPLING; DIRECT CURRENT; ELECTRIC POTENTIAL; ELECTRONS; HEATING; HYBRID SYSTEMS; MONTE CARLO METHOD; PLASMA DENSITY