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Title: Ionization of N{sub 2} in radio-frequent electric field

Rate coefficients for the electron impact ionization of the N{sub 2} molecule are calculated in non-equilibrium conditions in the presence of time-dependent electric field. A Monte Carlo simulation has been developed in order to determine non-equilibrium electron energy distribution functions within one period of the radio-frequent (RF) electric field. By using these distribution functions, rate coefficients for ionization of the N{sub 2} molecule have been obtained time resolved within one period in the frequency range from 13.56 up to 500 MHz, at effective reduced electric field values up to 700 Td. This work presents an insight into the temporal characteristics of ionizing process and provides the ionization rate coefficients that can be of great use for correct implementation in modeling RF plasma discharges. A behavior of rate coefficients under the influence of magnitude and frequency of the fields was studied separately revealing some interesting features in time dependence.
Authors:
; ; ; ;  [1] ;  [2]
  1. Faculty of Physics, University of Belgrade, Studentski trg 12, P.O. Box 44, 11000 Belgrade (Serbia)
  2. Faculty of Physical Chemistry, University of Belgrade, Studentski trg 12, P.O. Box 47, 11158 Belgrade (Serbia)
Publication Date:
OSTI Identifier:
22304161
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 21; Journal Issue: 6; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; COMPUTERIZED SIMULATION; DISTRIBUTION FUNCTIONS; ELECTRIC FIELDS; ENERGY SPECTRA; IONIZATION; MHZ RANGE; MONTE CARLO METHOD; PLASMA; TIME DEPENDENCE; TIME RESOLUTION