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Title: Kinetic simulation of capacitively coupled plasmas driven by trapezoidal asymmetric voltage pulses

A kinetic Particle-In-Cell simulation with Monte Carlo Collisions was performed of a geometrically symmetric capacitively coupled, parallel-plate discharge in argon, driven by trapezoidal asymmetric voltage pulses with a period of 200 ns. The discharge was electrically asymmetric, making the ion energy distributions at the two electrodes different from one another. The fraction of the period (α), during which the voltage was kept at a constant (top-flat) positive value, was a critical control parameter. For the parameter range investigated, as α increased, the mean ion energy on the grounded electrode increased and the ions became more directional, whereas the opposite was found for the ions striking the powered electrode. The absolute value of the DC self-bias voltage decreased as α increased. Plasma instabilities, promoted by local double layers and electric field reversals during the time of the positive voltage excursion, were characterized by electron plasma waves launched from the sheath edge.
Authors:
;  [1]
  1. Plasma Processing Laboratory, Department of Chemical and Biomolecular Engineering, University of Houston, Houston, Texas 77204-4004 (United States)
Publication Date:
OSTI Identifier:
22303981
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 23; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ARGON; ASYMMETRY; COLLISIONS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ELECTRON PLASMA WAVES; ENERGY SPECTRA; EXCURSIONS; MONTE CARLO METHOD; PARTICLES; PLASMA INSTABILITY; PLATES; PULSES; SIMULATION; SYMMETRY