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Title: Transport of low pressure electronegative SF{sub 6} plasma through a localized magnetic filter

The generation of an ion-ion plasma where only few electrons are present in the discharge could be appropriated in the context of ion plasma source applications. We present in this paper results obtained with a one-dimensional fluid model in the context of low pressure electronegative SF{sub 6} plasma. Without magnetic field, results show that the electron density is still large in the discharge. With a localized magnetic filter, where the magnetic field strength is such that the transport of the electrons is affected while the transport of ion species remains unmagnetized, we show that a region with a negative–positive ion plasma is found downstream the magnetic filter. The negative ions are produced in the filter due to the decrease of electron temperature. We also find conditions when the plasma sheath near the biased electrode collapses and the negative ion extraction from the plasma becomes possible. In addition, the influence of E × B electron transport on the one-dimensional model results is discussed.
Authors:
; ;  [1]
  1. LAPLACE (Laboratoire Plasma et Conversion d'Energie), Universite de Toulouse, UPS, INPT Toulouse, 118 route de Narbonne, F-31062 Toulouse Cedex 9, France and CNRS, LAPLACE, F-31062 Toulouse (France)
Publication Date:
OSTI Identifier:
22303805
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 21; Journal Issue: 8; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANIONS; CATIONS; ELECTRODES; ELECTRON DENSITY; ELECTRON TEMPERATURE; MAGNETIC FIELDS; MAGNETIC FILTERS; PLASMA SHEATH; SULFUR FLUORIDES