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Title: Probe diagnostics of electron distributions in plasma with spatial and angular resolution

This paper discusses the spatial resolution that is required to study inhomogeneous, low-temperature plasmas and is based on a review of low-temperature plasma electron kinetics and methods for probe measurements of electron energy distribution functions (EEDFs). It is stated that EEDFs can be extracted from probe measurements by applying an appropriate probe theory. The Druyvesteyn formula is most commonly used for this extraction and has been used in numerous publications, but more general theory can be used for a wider range of gas pressures. It is demonstrated that the Druyvesteyn formula can be obtained from the general theory as a limiting case. This paper justifies the application of wall probes in plasma studies of an energetic part of EEDFs. This justification is made for an idealized probe. We briefly review the methods for studying anisotropic plasmas and their usefulness in plasma research. It is demonstrated that to determine anisotropic electron energy distribution functions, a planar, one-sided probe is most convenient.
Authors:
;  [1]
  1. St. Petersburg State University, St. Petersburg 199034, Russia and ITMO University, Kronverkskiy pr. 49, St. Petersburg 197101 (Russian Federation)
Publication Date:
OSTI Identifier:
22303665
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 21; Journal Issue: 9; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ELECTRONS; ENERGY SPECTRA; PLASMA; PROBES; SPATIAL RESOLUTION