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Title: Plasma interactions determine the composition in pulsed laser deposited thin films

Plasma chemistry and scattering strongly affect the congruent, elemental transfer during pulsed laser deposition of target metal species in an oxygen atmosphere. Studying the plasma properties of La{sub 0.6}Sr{sub 0.4}MnO{sub 3}, we demonstrate for as grown La{sub 0.6}Sr{sub 0.4}MnO{sub 3-δ} films that a congruent transfer of metallic species is achieved in two pressure windows: ∼10{sup −3} mbar and ∼2 × 10{sup −1} mbar. In the intermediate pressure range, La{sub 0.6}Sr{sub 0.4}MnO{sub 3-δ} becomes cation deficient and simultaneously almost fully stoichiometric in oxygen. Important for thin film growth is the presence of negative atomic oxygen and under which conditions positive metal-oxygen ions are created in the plasma. This insight into the plasma chemistry shows why the pressure window to obtain films with a desired composition and crystalline structure is narrow and requires a careful adjustment of the process parameters.
Authors:
; ; ; ; ;  [1] ;  [2]
  1. Paul Scherrer Institute, CH-5232 Villigen PSI (Switzerland)
  2. Laboratory of Ion Beam Physics, ETH Zurich, CH-8093 Zurich (Switzerland)
Publication Date:
OSTI Identifier:
22303548
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 11; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ENERGY BEAM DEPOSITION; INTERACTIONS; LANTHANUM COMPOUNDS; LASER RADIATION; MANGANATES; METALS; OXYGEN; OXYGEN IONS; PLASMA; PULSED IRRADIATION; PULSES; SCATTERING; STOICHIOMETRY; STRONTIUM COMPOUNDS; THIN FILMS