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Title: Fabrication of nanogradient coatings for laser devices using the method of magnetron sputtering

Significant advantages of the magnetron sputtering method for producing complex high-quality optical coatings for laser devices are shown. Technology aspects of efficient fabrication of such coatings are considered. The capabilities of the developed automated technological and control equipment are described. (nanogradient dielectric coatings and metamaterials)
Authors:
; ;  [1] ;  [2]
  1. Open Joint-Stock Company M.F. Stel'makh Polyus Research Institute, Moscow (Russian Federation)
  2. 'Fotron-Auto' Scientific Manufacture Enterprise, Moscow (Russian Federation)
Publication Date:
OSTI Identifier:
22303359
Resource Type:
Journal Article
Resource Relation:
Journal Name: Quantum Electronics (Woodbury, N.Y.); Journal Volume: 43; Journal Issue: 9; Other Information: Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; COATINGS; CONTROL EQUIPMENT; DIELECTRIC MATERIALS; FABRICATION; LASERS; MAGNETRONS; SPUTTERING