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Title: Formation of an array of ordered nanocathodes based on carbon nanotubes by nanoimprint lithography and PECVD processes

Technology for the production of an array of ordered nanoemitters based on carbon nanotubes is developed. The technological parameters of the fabrication of carbon nanotubes are chosen. It is shown that the structures produced exhibit field electron emission with an emission current of 8 μA and a threshold voltage of 80 V.
Authors:
; ; ;  [1] ; ; ; ;  [2]
  1. National Research University of Electronic Technology “MIET” (Russian Federation)
  2. National Research University of Electronic Technology “MIET”, Research and Production Association “Technological Center” (Russian Federation)
Publication Date:
OSTI Identifier:
22300390
Resource Type:
Journal Article
Resource Relation:
Journal Name: Semiconductors; Journal Volume: 48; Journal Issue: 13; Other Information: Copyright (c) 2014 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 77 NANOSCIENCE AND NANOTECHNOLOGY; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; ELECTRIC POTENTIAL; ELECTRON EMISSION; FABRICATION