Formation of an array of ordered nanocathodes based on carbon nanotubes by nanoimprint lithography and PECVD processes
- National Research University of Electronic Technology “MIET” (Russian Federation)
- National Research University of Electronic Technology “MIET”, Research and Production Association “Technological Center” (Russian Federation)
Technology for the production of an array of ordered nanoemitters based on carbon nanotubes is developed. The technological parameters of the fabrication of carbon nanotubes are chosen. It is shown that the structures produced exhibit field electron emission with an emission current of 8 μA and a threshold voltage of 80 V.
- OSTI ID:
- 22300390
- Journal Information:
- Semiconductors, Vol. 48, Issue 13; Other Information: Copyright (c) 2014 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7826
- Country of Publication:
- United States
- Language:
- English
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