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Title: Extracting the effective mass of electrons in transparent conductive oxide thin films using Seebeck coefficient

A method is proposed that combines Seebeck coefficient and carrier concentration to determine the electron effective mass of transparent conductive oxide (TCO) thin films. Experiments were conducted to test the validity of this approach on the transparent conductive Ga-doped ZnO thin films deposited by magnetron sputtering. An evident agreement of the calculated electron effective mass of the films is observed between the proposed approach and the previous studies. Besides, the optical carrier concentration and mobility derived from the calculated electron effective mass and spectroscopic ellipsometry using a complex dielectric function are consistent with those from direct Hall-effect measurement. The agreements suggest that Seebeck coefficient can serve as an alternative tool for extracting the effective mass of electrons in TCO films.
Authors:
; ;  [1]
  1. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054 (China)
Publication Date:
OSTI Identifier:
22300279
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 21; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CARRIER MOBILITY; CARRIERS; DIELECTRIC MATERIALS; DOPED MATERIALS; EFFECTIVE MASS; ELECTRIC CONDUCTIVITY; ELECTRONS; ELLIPSOMETRY; GALLIUM ADDITIONS; HALL EFFECT; MAGNETRONS; SEEBECK EFFECT; SPUTTERING; THIN FILMS; ZINC OXIDES