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Title: X-ray absorption spectroscopy elucidates the impact of structural disorder on electron mobility in amorphous zinc-tin-oxide thin films

We investigate the correlation between the atomic structures of amorphous zinc-tin-oxide (a-ZTO) thin films grown by atomic layer deposition (ALD) and their electronic transport properties. We perform synchrotron-based X-ray absorption spectroscopy at the K-edges of Zn and Sn with varying [Zn]/[Sn] compositions in a-ZTO thin films. In extended X-ray absorption fine structure (EXAFS) measurements, signal attenuation from higher-order shells confirms the amorphous structure of a-ZTO thin films. Both quantitative EXAFS modeling and X-ray absorption near edge spectroscopy (XANES) reveal that structural disorder around Zn atoms increases with increasing [Sn]. Field- and Hall-effect mobilities are observed to decrease with increasing structural disorder around Zn atoms, suggesting that the degradation in electron mobility may be correlated with structural changes.
Authors:
; ;  [1] ; ;  [2] ;  [3] ; ;  [4]
  1. Massachusetts Institute of Technology, Cambridge, Massachusetts 02139 (United States)
  2. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138 (United States)
  3. Department of Materials Science and Engineering, Chonnam National University, Gwangju 500-757 (Korea, Republic of)
  4. Physics Department and CSRRI, Illinois Institute of Technology, Chicago, Illinois 606016 (United States)
Publication Date:
OSTI Identifier:
22300257
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 24; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ABSORPTION; ABSORPTION SPECTROSCOPY; AMORPHOUS STATE; ATOMS; CORRELATIONS; ELECTRON MOBILITY; FINE STRUCTURE; HALL EFFECT; SIMULATION; THIN FILMS; TIN ADDITIONS; X RADIATION; X-RAY SPECTROSCOPY; ZINC OXIDES