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Title: Bendable ZnO thin film surface acoustic wave devices on polyethylene terephthalate substrate

Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ZnO films deposited on flexible polyethylene terephthalate substrates at 120 °C. Dual resonance modes, namely, the zero order pseudo asymmetric (A{sub 0}) and symmetric (S{sub 0}) Lamb wave modes, have been obtained from the SAW devices. The SAW devices perform well even after repeated flexion up to 2500 με for 100 times, demonstrating its suitability for flexible electronics application. The SAW devices are also highly sensitive to compressive and tensile strains, exhibiting excellent anti-strain deterioration property, thus, they are particularly suitable for sensing large strains.
Authors:
; ; ; ; ;  [1] ;  [1] ;  [2]
  1. Department of Info. Sci. and Electron. Eng., Zhejiang University and Cyrus Tang Center for Sensor Mater. and Appl., 38 Zheda Road, Hangzhou 310027 (China)
  2. (United Kingdom)
Publication Date:
OSTI Identifier:
22300156
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 21; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ASYMMETRY; EQUIPMENT; POLYESTERS; SOUND WAVES; STRAINS; SUBSTRATES; SURFACES; SYMMETRY; THIN FILMS; ZINC OXIDES