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Title: Observation of transient electric fields in particle-in-cell simulation of capacitively coupled discharges

The analytical prediction of the presence of transient electric field regions between the bulk plasma and sheath edge in radio frequency capacitively coupled plasma (RF-CCP) discharges has been reported by Kaganovich [Phys. Rev. Lett. 89, 265006 (2002)]. In this paper, we have used the semi-infinite particle-in-cell (PIC) simulation technique to verify the theoretical prediction for the existence of transient electric field in the linear regime; it is shown that the PIC simulation results are in good agreement with the results predicted by analytical model in this regime. It is also demonstrated that the linear theory overestimates the transient electric field as one moves from linear to weakly nonlinear regime. The effect of applied RF current density and electron temperature on evolution of transition field and phase mixing regime has been explored.
Authors:
; ;  [1]
  1. Institute for Plasma Research (IPR), Bhat, Gandhinagar 382428 (India)
Publication Date:
OSTI Identifier:
22299858
Resource Type:
Journal Article
Resource Relation:
Journal Name: Physics of Plasmas; Journal Volume: 21; Journal Issue: 7; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; CURRENT DENSITY; ELECTRIC FIELDS; ELECTRON TEMPERATURE; NONLINEAR PROBLEMS; PLASMA; RADIOWAVE RADIATION; SIMULATION; TRANSIENTS