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Title: Epitaxial c-axis oriented BaTiO{sub 3} thin films on SrTiO{sub 3}-buffered Si(001) by atomic layer deposition

Atomic layer deposition (ALD) of epitaxial c-axis oriented BaTiO{sub 3} (BTO) on Si(001) using a thin (1.6 nm) buffer layer of SrTiO{sub 3} (STO) grown by molecular beam epitaxy is reported. The ALD growth of crystalline BTO films at 225  °C used barium bis(triisopropylcyclopentadienyl), titanium tetraisopropoxide, and water as co-reactants. X-ray diffraction (XRD) reveals a high degree of crystallinity and c-axis orientation of as-deposited BTO films. Crystallinity is improved after vacuum annealing at 600  °C. Two-dimensional XRD confirms the tetragonal structure and orientation of 7–20-nm thick films. The effect of the annealing process on the BTO structure is discussed. A clean STO/Si interface is found using in-situ X-ray photoelectron spectroscopy and confirmed by cross-sectional scanning transmission electron microscopy. The capacitance-voltage characteristics of 7–20 nm-thick BTO films are examined and show an effective dielectric constant of ∼660 for the heterostructure.
Authors:
; ;  [1] ; ;  [2] ; ;  [3] ;  [4]
  1. Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712 (United States)
  2. Department of Physics, The University of Texas at Austin, Austin, Texas 78712 (United States)
  3. Department of Electrical Engineering, The University of Texas at Austin, Austin, Texas 78712 (United States)
  4. IBM Research Division, Yorktown Heights, New York 10593 (United States)
Publication Date:
OSTI Identifier:
22293116
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 8; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ANNEALING; BARIUM COMPOUNDS; CAPACITANCE; CRYSTAL GROWTH; DEPOSITION; ELECTRIC POTENTIAL; MOLECULAR BEAM EPITAXY; PERMITTIVITY; STRONTIUM TITANATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; TWO-DIMENSIONAL CALCULATIONS; WATER; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY