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Title: Microcantilevers with embedded accelerometers for dynamic atomic force microscopy

The measurement of the intermittent interaction between an oscillating nanotip and the sample surface is a key challenge in dynamic Atomic Force Microscopy (AFM). Accelerometers integrated onto AFM cantilevers can directly measure this interaction with minimal cantilever modification but have been difficult to realize. Here, we design and fabricate high frequency bandwidth accelerometers on AFM cantilevers to directly measure the tip acceleration in commercial AFM systems. We demonstrate a simple way of calibrating such accelerometers and present experiments using amplitude modulated AFM on freshly cleaved mica samples in water to study the response of the accelerometer.
Authors:
;  [1] ;  [2]
  1. School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47907 (United States)
  2. Department of Physics, Purdue University, West Lafayette, Indiana 47907 (United States)
Publication Date:
OSTI Identifier:
22293081
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 8; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCELEROMETERS; AMPLITUDES; ATOMIC FORCE MICROSCOPY; INTERACTIONS; MICA; MODULATION; WATER