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Title: Characterization of multilayer nitride coatings by electron microscopy and modulus mapping

This paper discusses multi-scale characterization of physical vapour deposited multilayer nitride coatings using a combination of electron microscopy and modulus mapping. Multilayer coatings with a triple layer structure based on TiAlN and nanocomposite nitrides with a nano-multilayered architecture were deposited by Cathodic arc deposition and detailed microstructural studies were carried out employing Energy Dispersive Spectroscopy, Electron Backscattered Diffraction, Focused Ion Beam and Cross sectional Transmission Electron Microscopy in order to identify the different phases and to study microstructural features of the various layers formed as a result of the deposition process. Modulus mapping was also performed to study the effect of varying composition on the moduli of the nano-multilayers within the triple layer coating by using a Scanning Probe Microscopy based technique. To the best of our knowledge, this is the first attempt on modulus mapping of cathodic arc deposited nitride multilayer coatings. This work demonstrates the application of Scanning Probe Microscopy based modulus mapping and electron microscopy for the study of coating properties and their relation to composition and microstructure. - Highlights: • Microstructure of a triple layer nitride coating studied at multiple length scales. • Phases identified by EDS, EBSD and SAED (TEM). • Nanolayered, nanocomposite structure ofmore » the coating studied using FIB and TEM. • Modulus mapping identified moduli variation even in a nani-multilayer architecture.« less
Authors:
 [1] ;  [2] ;  [3] ; ;  [1] ;  [1] ;  [1]
  1. International Advanced Research Centre for Powder Metallurgy and New Materials (ARCI), Balapur P.O., Hyderabad — 500005 India (India)
  2. (India)
  3. School of Engineering Sciences and Technology, University of Hyderabad, Gachibowli, Hyderabad — 500046 India (India)
Publication Date:
OSTI Identifier:
22285054
Resource Type:
Journal Article
Resource Relation:
Journal Name: Materials Characterization; Journal Volume: 81; Other Information: Copyright (c) 2013 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; BACKSCATTERING; DEPOSITS; ELECTRON DIFFRACTION; ION BEAMS; LAYERS; MAPPING; MICROSTRUCTURE; TRANSMISSION ELECTRON MICROSCOPY