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Title: Ultra-thin nanocrystalline diamond membranes as pressure sensors for harsh environments

Glass and diamond are suitable materials for harsh environments. Here, a procedure for fabricating ultra-thin nanocrystalline diamond membranes on glass, acting as an electrically insulating substrate, is presented. In order to investigate the pressure sensing properties of such membranes, a circular, highly conductive boron-doped nanocrystalline diamond membrane with a resistivity of 38 mΩ cm, a thickness of 150 nm, and a diameter of 555 μm is fabricated in the middle of a Hall bar structure. During the application of a positive differential pressure under the membrane (0–0.7 bar), four point piezoresistive effect measurements are performed. From these measurements, it can be concluded that the resistance response of the membrane, as a function of differential pressure, is highly linear and sensitive.
Authors:
;  [1] ;  [2] ;  [1]
  1. Institute for Materials Research (IMO), Hasselt University, Wetenschapspark 1, B-3590 Diepenbeek (Belgium)
  2. (Belgium)
Publication Date:
OSTI Identifier:
22283292
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 7; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 77 NANOSCIENCE AND NANOTECHNOLOGY; CRYSTAL DOPING; CRYSTALS; DIAMONDS; ELECTRIC CONDUCTIVITY; HALL EFFECT; MEMBRANES; NANOSTRUCTURES; PRESSURE DEPENDENCE; SENSORS; SUBSTRATES