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Title: The application of orthogonal photolithography to micro-scale organic field effect transistors and complementary inverters on flexible substrate

Micro-scale pentacene organic field effect transistors (OFETs) were fabricated on a flexible poly(ethylene terephthalate) (PET) substrate. By applying a highly fluorinated developing solvents and its compatible photoresist materials, it has become possible to make the micro-scale patterning for organic devices using standard photolithography without damaging the underlying polymer layers. The flexible pentacene OFETs with 3 μm-sized channel length exhibited stable electrical characteristics under bent configurations and under a large number of repetitive bending cycles. Furthermore, we demonstrated micro-scale organic complementary inverters on a flexible PET substrate using p-type pentacene and n-type copper hexadecafluorophthalocyanine materials.
Authors:
; ; ; ; ; ;  [1] ; ;  [2]
  1. Department of Physics and Astronomy, and Institute of Applied Physics, Seoul National University, Seoul 151-747 (Korea, Republic of)
  2. Department of Polymer Science and Engineering, Inha University, Incheon 402-751 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22283283
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; FIELD EFFECT TRANSISTORS; INVERTERS; LAYERS; MASKING; ORGANIC POLYMERS; PENTACENE; PHOTOCONDUCTIVITY; SOLVENTS; SUBSTRATES