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Title: High quality SiC microdisk resonators fabricated from monolithic epilayer wafers

The exquisite mechanical properties of SiC have made it an important industrial material with applications in microelectromechanical devices and high power electronics. Recently, the optical properties of SiC have garnered attention for applications in photonics, quantum information, and spintronics. This work demonstrates the fabrication of microdisks formed from a p-N SiC epilayer material. The microdisk cavities fabricated from the SiC epilayer material exhibit quality factors of as high as 9200 and the approach is easily adaptable to the fabrication of SiC-based photonic crystals and other photonic and optomechanical devices.
Authors:
 [1] ;  [2] ;  [3] ; ;  [1] ;  [1] ;  [4]
  1. School of Engineering and Applied Sciences, Harvard University, Cambridge, Massachusetts 02138 (United States)
  2. (United States)
  3. Department of Physics, Harvard University, Cambridge, Massachusetts 02138 (United States)
  4. (Australia)
Publication Date:
OSTI Identifier:
22283268
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CAVITY RESONATORS; CRYSTALS; FABRICATION; MECHANICAL PROPERTIES; OPTICAL PROPERTIES; QUALITY FACTOR; QUANTUM INFORMATION; SILICON CARBIDES