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Title: Single-crystal superconducting nanowires of NbSe{sub 2} fabricated by reactive plasma etching

We present the preparation and measurements of nanowires of single-crystal NbSe{sub 2}. These nanowires were prepared on ultrathin (≲10 nm) flakes of NbSe{sub 2} mechanically exfoliated from a bulk single crystal using a process combining electron beam lithography and reactive plasma etching. The electrical contacts to the nanowires were prepared using Ti/Au. Our technique, which overcomes several limitations of methods developed previously for fabricating superconducting nanowires, also allows for the preparation of complex superconducting nanostructures with a desired geometry. Current-voltage characteristics of individual superconducting single-crystal nanowires with widths down to 30 nm and cross-sectional areas as low as 270 nm{sup 2} were measured.
Authors:
; ;  [1] ; ;  [2] ;  [1] ;  [3]
  1. Department of Physics and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
  2. Department of Physics, Zhejiang University, Hangzhou 310027 (China)
  3. (Ministry of Education), Shanghai Jiao Tong University, Shanghai 200240 (China)
Publication Date:
OSTI Identifier:
22283256
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 77 NANOSCIENCE AND NANOTECHNOLOGY; ELECTRIC CONTACTS; ELECTRON BEAMS; ETCHING; GOLD; MONOCRYSTALS; NIOBIUM SELENIDES; QUANTUM WIRES; SUPERCONDUCTIVITY; SUPERCONDUCTORS; TITANIUM