Zr/oxidized diamond interface for high power Schottky diodes
- Univ. Grenoble Alpes, Inst NEEL, F-38042 Grenoble (France)
High forward current density of 10{sup 3} A/cm{sup 2} (at 6 V) and a breakdown field larger than 7.7 MV/cm for diamond diodes with a pseudo-vertical architecture, are demonstrated. The power figure of merit is above 244 MW/cm{sup 2} and the relative standard deviation of the reverse current density over 83 diodes is 10% with a mean value of 10{sup −9} A/cm{sup 2}. These results are obtained with zirconium as Schottky contacts on the oxygenated (100) oriented surface of a stack comprising an optimized lightly boron doped diamond layer on a heavily boron doped one, epitaxially grown on a Ib substrate. The origin of such performances are discussed.
- OSTI ID:
- 22283227
- Journal Information:
- Applied Physics Letters, Vol. 104, Issue 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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