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Title: Formation and evolution of ripples on ion-irradiated semiconductor surfaces

We have examined the formation and evolution of ripples on focused-ion-beam (FIB) irradiated compound semiconductor surfaces. Using initially normal-incidence Ga{sup +} FIB irradiation of InSb, we tuned the local beam incidence angle (θ{sub eff}) by varying the pitch and/or dwell time. For single-pass FIB irradiation, increasing θ{sub eff} induces morphological evolution from pits and islands to ripples to featureless surfaces. Multiple-pass FIB irradiation of the rippled surfaces at a fixed θ{sub eff} leads to island formation on the ripple crests, followed by nanorod (NR) growth. This ripple-NR transition provides an alternative approach for achieving dense arrays of NRs.
Authors:
; ; ; ; ; ;  [1]
  1. Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109-2136 (United States)
Publication Date:
OSTI Identifier:
22283226
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; GALLIUM IONS; INCIDENCE ANGLE; INDIUM ANTIMONIDES; ION BEAMS; IRRADIATION; PHYSICAL RADIATION EFFECTS; SEMICONDUCTOR MATERIALS; SURFACES