Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

Sabra, Karim G.; Wasequr Rashid, M.; Hasler, Jennifer; Levent Degertekin, F.

doi:10.1063/1.4864635

Title: Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials

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Abstract

Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.

Authors:

Sabra, Karim G. ^[1]; Wasequr Rashid, M.; Hasler, Jennifer ^[2]; Levent Degertekin, F. ^[1]

George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 801Ferst Drive, Georgia 30332-0405 (United States)
School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250 (United States)

Publication Date:: Mon Feb 03 00:00:00 EST 2014

OSTI Identifier:: 22283206

Resource Type:: Journal Article

Journal Name:: Applied Physics Letters

Additional Journal Information:: Journal Volume: 104; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951

Country of Publication:: United States

Language:: English

Subject:: 77 NANOSCIENCE AND NANOTECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ELECTRIC POTENTIAL; IMPEDANCE; MEMBRANES; NANOSTRUCTURES; PERIODICITY; TRANSDUCERS; ULTRASONIC WAVES

Citation Formats


                    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu, Sabra, Karim G., Wasequr Rashid, M., Hasler, Jennifer, Levent Degertekin, F., and School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials.  United States: N. p., 2014. 
        Web.  doi:10.1063/1.4864635.

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                    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu, Sabra, Karim G., Wasequr Rashid, M., Hasler, Jennifer, Levent Degertekin, F., & School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250. Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials.  United States.  https://doi.org/10.1063/1.4864635

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                    Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu, Sabra, Karim G., Wasequr Rashid, M., Hasler, Jennifer, Levent Degertekin, F., and School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250. 2014.  
        "Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials".  United States.  https://doi.org/10.1063/1.4864635.

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@article{osti_22283206,

  title        = {Capacitive micromachined ultrasonic transducer arrays as tunable acoustic metamaterials},

  author       = {Lani, Shane W., E-mail: shane.w.lani@gmail.com, E-mail: karim.sabra@me.gatech.edu, E-mail: levent.degertekin@me.gatech.edu and Sabra, Karim G. and Wasequr Rashid, M. and Hasler, Jennifer and Levent Degertekin, F. and School of Electrical and Computer Engineering, Georgia Institute of Technology, Van Leer Electrical Engineering Building, 777 Atlantic Drive NW, Atlanta, Georgia 30332-0250},

  abstractNote = {Capacitive Micromachined Ultrasonic Transducers (CMUTs) operating in immersion support dispersive evanescent waves due to the subwavelength periodic structure of electrostatically actuated membranes in the array. Evanescent wave characteristics also depend on the membrane resonance which is modified by the externally applied bias voltage, offering a mechanism to tune the CMUT array as an acoustic metamaterial. The dispersion and tunability characteristics are examined using a computationally efficient, mutual radiation impedance based approach to model a finite-size array and realistic parameters of variation. The simulations are verified, and tunability is demonstrated by experiments on a linear CMUT array operating in 2-12 MHz range.},

  doi          = {10.1063/1.4864635},

  url          = {https://www.osti.gov/biblio/22283206},
  journal      = {Applied Physics Letters},

  issn         = {0003-6951},

  number       = 5,

  volume       = 104,

  place        = {United States},

  year         = {Mon Feb 03 00:00:00 EST 2014},

  month        = {Mon Feb 03 00:00:00 EST 2014}

}

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