skip to main content

Title: Probing deeper by hard x-ray photoelectron spectroscopy

We report an hard x-ray photoelectron spectroscopy method combining high excitation energy (15 keV) and improved modelling of the core-level energy loss features. It provides depth distribution of deeply buried layers with very high sensitivity. We show that a conventional approach relying on intensities of the core-level peaks is unreliable due to intense plasmon losses. We reliably determine the depth distribution of 1 ML La in a high-κ/metal gate stack capped with 50 nm a-Si. The method extends the sensitivity of photoelectron spectroscopy to depths beyond 50 nm.
Authors:
; ; ;  [1] ;  [1] ;  [2] ;  [3] ;  [4] ;  [5] ;  [6]
  1. CEA, LETI, MINATEC Campus, 38054 Grenoble Cedex 09 (France)
  2. (France)
  3. European Synchrotron Radiation Facility, 6 rue Jules Horowitz, F-38043 Grenoble (France)
  4. STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles (France)
  5. Institut des Nanotechnologies de Lyon (INL), UMR CNRS 5270, Ecole Centrale de Lyon, 36, avenue Guy de Collongue 69 134 Ecully Cedex (France)
  6. Department of Physics, Chemistry and Pharmacy, University of Southern Denmark, DK-5230 Odense M (Denmark)
Publication Date:
OSTI Identifier:
22283204
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; COMPUTERIZED SIMULATION; ENERGY LOSSES; EXCITATION; HARD X RADIATION; LANTHANUM; LAYERS; PHOTOELECTRON SPECTROSCOPY; PROBES; SENSITIVITY; SPATIAL DISTRIBUTION