skip to main content

SciTech ConnectSciTech Connect

Title: High-performance MoS{sub 2} transistors with low-resistance molybdenum contacts

In this Letter, molybdenum (Mo) is introduced and evaluated as an alternative contact metal to atomically-thin molybdenum disulphide (MoS{sub 2}), and high-performance field-effect transistors are experimentally demonstrated. In order to understand the physical nature of the interface and highlight the role of the various factors contributing to the Mo-MoS{sub 2} contacts, density functional theory (DFT) simulations are employed, which reveal that Mo can form high quality contact interface with monolayer MoS{sub 2} with zero tunnel barrier and zero Schottky barrier under source/drain contact, as well as an ultra-low Schottky barrier (0.1‚ÄČeV) at source/drain-channel junction due to strong Fermi level pinning. In agreement with the DFT simulations, high mobility, high ON-current, and low contact resistance are experimentally demonstrated on both monolayer and multilayer MoS{sub 2} transistors using Mo contacts. The results obtained not only reveal the advantages of using Mo as a contact metal for MoS{sub 2} but also highlight the fact that the properties of contacts with 2-dimensional materials cannot be intuitively predicted by solely considering work function values and Schottky theory.
Authors:
; ;  [1]
  1. Department of Electrical and Computer Engineering, University of California, Santa Barbara, California 93106 (United States)
Publication Date:
OSTI Identifier:
22283035
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 104; Journal Issue: 9; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CARRIER MOBILITY; COMPUTERIZED SIMULATION; DENSITY FUNCTIONAL METHOD; ELECTRIC CURRENTS; FERMI LEVEL; FIELD EFFECT TRANSISTORS; INTERFACES; LAYERS; MOLYBDENUM; MOLYBDENUM SULFIDES; SEMICONDUCTOR JUNCTIONS; WORK FUNCTIONS