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Title: Template assisted self-assembly of iron oxide nanoparticles: An x-ray structural analysis

We have fabricated by e-beam lithography periodic arrays of rectangular shaped trenches of different widths into Si substrates. The trenches were filled with iron oxide nanoparticles, 20 nm in diameter, by spin-coating them onto the Si substrate. The trenches have the purpose to assist the self-assembly of the iron oxide nanoparticles. Using x-ray scattering techniques, we have analyzed the structure factor of the trenches before and after filling in order to determine the filling factor. We present a theoretical analysis of the x-ray scattering function within the distorted-wave Born approximation and we present a quantitative comparison between theory and experiment.
Authors:
 [1] ;  [2] ;  [1] ;  [3] ;  [4] ;  [3] ;  [3] ;  [4]
  1. Department of Physics, Ruhr-University Bochum, 44780 Bochum (Germany)
  2. (Germany)
  3. St.-Petersburg State University, Ul'yanovskaya ul.1, Petrodvorets, St.-Petersburg 198904 (Russian Federation)
  4. (Russian Federation)
Publication Date:
OSTI Identifier:
22278120
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 115; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; 77 NANOSCIENCE AND NANOTECHNOLOGY; COMPARATIVE EVALUATIONS; DWBA; ELECTRON BEAMS; IRON OXIDES; MASKING; NANOSTRUCTURES; PARTICLE SIZE; PARTICLES; PERIODICITY; SILICON; SPIN-ON COATING; STRUCTURE FACTORS; SUBSTRATES; X-RAY DIFFRACTION